VeritySEM 5i CD-SEM 3D NAND

The newest in the Applied Materials VeritySEM product family, VeritySEM 5i CD-SEM system features first-of-its-kind, in-line, 3D capabilities for high-volume metrology of logic and memory devices at the 1xnm node and beyond. Leveraging market-leading SEMVision® G6 core technology, the new system addresses the unprecedented challenges in measuring physical dimensions posed by leading-edge geometries. Its state-of-the-art, high-resolution SEM column makes possible measurements as small as 6nminnovative image enhancement algorithms aid measurement of fine pattern details. An in-column tilt-beam enables 3D FinFET metrology, while back-scattered electron (BSE) metrology addresses high aspect ratio 3D NAND structures, and BEOL via-in-trench bottom CD and characterization metrology.

FinFETs challenge traditional metrology in such measurements as gate and fin heights, whose uniformity is critical to device performance and yield. Current in-line CD SEM technology can monitor only top-view dimension variations, not those in height and slope. The VeritySEM 5i system’s in-column beam tilt remedies these issues, enabling gate and fin heights to be calculated and controlled.As technology scales down, the aspect ratios of 3D NAND memory structures are increasing to 60:1 and beyond, making accurate measurement of the bottom CD impossible using conventional metrology. High-resolution BSE imaging enhances the signal received from within these structures, allowing the VeritySEM 5i system to “see” deep into vias and trenches for precision measurement. This capability also improves metrology for via-in-trench bottom CD in BEOL processing where the desired connectivity between underlying and overlaying metal layers must be achieved to minimize via resistance.

The VeritySEM 5i system’s exceptional in-line accuracy and process control eliminate more time-consuming and costly off-line wafer cross-sectioning while helping chipmakers to streamline process development, improve device performance and yield, and shorten ramp times to high-volume production.

The VeritySEM 5i system continues to offer hands free recipe creation and full automation. An offline recipe generator (ORG) features recipe editing capabilities via an external server, enabling multiple users to create recipes from computer-aided design offline without the need for wafers. The recipes are automatically stored in the tool database. By eliminating recipe creation time loss, the ORG enables the user to maximize the tool's utilization in production.

The tool's OPC|CheckMax is a proven solution for automating the optical proximity correction (OPC) mask qualification process. As scaling proceeds below 32nm, OPC-enhanced features are commonly incorporated into mask designs for all layers. Hundreds of CD measurements are required to verify that the features printed on the wafer are indeed what the device designers intended to produce. With a suite of proprietary algorithms, OPC|CheckMax receives input from electronic design automation systems, automatically creates CD-SEM measurement recipes, and then directs the VeritySEM 5i system to measure thousands of sites at high throughput without operator assistance.

您好，楼主

sems是指搜索引擎营销，是英文Search Engine Marketing的翻译，简称为SEM。就是根据用户使用搜索引擎的方式，利用用户检索信息的机会尽可能将营销信息传递给目标用户。简单来说，搜索引擎营销就是基于搜索引擎平台的网络营销，利用人们对搜索引擎的依赖和使用习惯，在人们检索信息的时候尽可能将营销信息传递给目标客户。

更多内容：可以参考百度百科：http://baike.baidu.com/link?url=6cziptvtjV4r4c-E0dY-Si8Aok0as_GUh63jvKsBa9zyEKNuhYWMAE5aUyeAX4KywGjuOaR7BpGASdaUQM7yOoQt45tAWsbxVZW8j8zlzBHms3DORt9z38lLfgKg4V0nodYe7HKcMtMquPF8HUYRDK

什么叫搜索引擎营销呢？

所谓搜索引擎营销，就是指商家使自己的信息在网络上排名靠前，从而引起消费者关注，促进客户询盘成交的营销活动。

为什么要开展搜索引擎营销呢？

因为搜索引擎上聚集了大量的人群，而且这些人群是基于搜索关键字查找信息的，相对而言目标感比较强，客户基本上都是基于需求才进行搜索的。

据中国电子商务研究中心第39次互联网统计报告显示，在用户日常使用习惯中，搜索引擎用户占比达到82.4%。是除了即时通讯之外的，第二大网络应用。因此毫无疑问，这个地方必然也成了营销的主要阵地。

搜索引擎营销的主要应用形式有哪些呢？

搜索引擎营销主要有两种形式，一种是付费的搜索引擎营销，一种是免费的SEO。

我们来看一张图片，图中带有广告两个字的结果都是付费搜索引擎营销，其实这是一种商家，让客户快速查找到自己的信息的搜索广告，其余没有广告两个字标注的，都是不花钱排名靠前的。专业上，我们称之为SEO。

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