sem扫描电镜是测什么的

SEM描电镜主要应用于微观形貌、颗粒尺寸、微区组成、元素分布、元素价态和化学键、晶体结构、相组成、结构缺陷、晶界结构和组成等。SEM一般通过搭配能谱仪EDS使用,可利用EDS进行元素成分定性、定量分析。用来观测芯片内部层次和测量各层厚度、观测并拍摄局部异常照片和测量异常尺寸、测量芯片关键尺寸线宽和孔径、定性和定量分析异常污 染物的化学元素组成。

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After firing, the final powders were sieved. The crystalline phases of doped LiFe0.9 Mg0.1 PO4 pow- ders were identified by X-ray diffraction using a Rigaku AFC5 diffractometer with a Cu K radiation. The diffraction data was collected at 0.02 (degree sign) step width over a 2θ range from10◦ to 90◦ . 在焚烧后，最终的粉末进行过筛。掺杂的LiFe0.9 Mg0.1PO4粉末的结晶相用采用Cu Kα辐射的RigakuAFC5衍射仪进行X射线衍射法鉴定。衍射数据在从10°到90°范围的2θ上以0.02（度符号）的步宽进行采集。The particle size was observed by scanning electron microscopy (SEM) images using a FEI Quanta 200 equipped with energy dispersive spectroscopy (EDS).离子尺寸用扫描电子显微镜（SEM）图像观察，该SEM为配备能量色散谱仪（EDS）的FEI Quanta 200。

The LiFe0.9 Mg0.1 PO4 pellet used for the electronic conductivity measurement was prepared by die-pressing LiFe0.9 Mg0.1 PO4 powders (without carbon and binders) with a pressure of 3 tonnes cm−2 , and then coating with Ag paste on both sides. The size of the pellet was around 1.3 cm diam- eter with 0.06 cm thickness. The electronic conductivity of LiFe0.9 Mg0.1 PO4 was measured by both linear polarization using Solartron 1287 and EIS using Solartron 1287/1260.

用于电子电导测量的LiFe0.9 Mg0.1 PO4颗粒用模压压制LiFe0.9 Mg0.1 PO4粉末（不含碳和黏结剂）而制备，压力为3t cm－2，然后用Ag糊在两面涂覆。颗粒的尺寸大约为1.3 cm直径和0.06cm厚度。LiFe0.9 Mg0.1 PO4的电子电导率可以用线性极化法，也可用EIS法测量。前者用Solartron1287，后者用Solartron1287/1260.

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