VeritySEM 5i CD-SEM 3D NAND

VeritySEM 5i CD-SEM 3D NAND,第1张

The newest in the Applied Materials VeritySEM product family, VeritySEM 5i CD-SEM system features first-of-its-kind, in-line, 3D capabilities for high-volume metrology of logic and memory devices at the 1xnm node and beyond. Leveraging market-leading SEMVision® G6 core technology, the new system addresses the unprecedented challenges in measuring physical dimensions posed by leading-edge geometries. Its state-of-the-art, high-resolution SEM column makes possible measurements as small as 6nminnovative image enhancement algorithms aid measurement of fine pattern details. An in-column tilt-beam enables 3D FinFET metrology, while back-scattered electron (BSE) metrology addresses high aspect ratio 3D NAND structures, and BEOL via-in-trench bottom CD and characterization metrology.

FinFETs challenge traditional metrology in such measurements as gate and fin heights, whose uniformity is critical to device performance and yield. Current in-line CD SEM technology can monitor only top-view dimension variations, not those in height and slope. The VeritySEM 5i system’s in-column beam tilt remedies these issues, enabling gate and fin heights to be calculated and controlled.As technology scales down, the aspect ratios of 3D NAND memory structures are increasing to 60:1 and beyond, making accurate measurement of the bottom CD impossible using conventional metrology. High-resolution BSE imaging enhances the signal received from within these structures, allowing the VeritySEM 5i system to “see” deep into vias and trenches for precision measurement. This capability also improves metrology for via-in-trench bottom CD in BEOL processing where the desired connectivity between underlying and overlaying metal layers must be achieved to minimize via resistance.

The VeritySEM 5i system’s exceptional in-line accuracy and process control eliminate more time-consuming and costly off-line wafer cross-sectioning while helping chipmakers to streamline process development, improve device performance and yield, and shorten ramp times to high-volume production.

The VeritySEM 5i system continues to offer hands free recipe creation and full automation. An offline recipe generator (ORG) features recipe editing capabilities via an external server, enabling multiple users to create recipes from computer-aided design offline without the need for wafers. The recipes are automatically stored in the tool database. By eliminating recipe creation time loss, the ORG enables the user to maximize the tool's utilization in production.

The tool's OPC|CheckMax is a proven solution for automating the optical proximity correction (OPC) mask qualification process. As scaling proceeds below 32nm, OPC-enhanced features are commonly incorporated into mask designs for all layers. Hundreds of CD measurements are required to verify that the features printed on the wafer are indeed what the device designers intended to produce. With a suite of proprietary algorithms, OPC|CheckMax receives input from electronic design automation systems, automatically creates CD-SEM measurement recipes, and then directs the VeritySEM 5i system to measure thousands of sites at high throughput without operator assistance.

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Abdominal Cavity

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Maniax

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Manifold Object

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Manufacturer's Pride

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Mental Frost

Mental Sickness

Mental Slaughter

Mental Terror

Mental Transformation

Mental Voice

Menticide

Meredion

Merging Flare

Mess

Messiah Paratroops

Metal Griffin

Metallisk Esel Hives

Metallus

Methanol

Midnight Sun (Fin)

Millennia

Mind Abduction

Mind Factory

Mind of Doll

Mind Riot

Mind-A-Stray

Minotauri

Miriam

Mirkhall

Mirror of Madness

Mirzadeh

Misanthropenum

Misantropical Painforest

Miseria (Fin)

Misery Inc. (Fin)

Misery of Insomnia

Mishere

Mistralth

Mistwander

Mokoma

Moment After Scarlet

MonsterSpank

Monstrosity (Fin)

Moonblaze

Moonfrost (Fin)

MoonMadness

Moonscape

Moonsorrow

Moravia

Morbid Dream

Morbid Savouring

Mordecai

Mordicus

Morg (Fin)

Morgudul

Morgue (Fin)

Morian

Morningstar (Fin)

Morpheus (Fin)

Morphosis (Fin)

Morrow

Mors Principium Est

Mors Subita (Fin)

Mortal Agony (Fin)

Mortal God

Mortare

Mortified Saint

Mortualia

Mortuary (Fin)

Mortyfear

Mosh Angel

Mother Depth

Motorhell

Mr. Crowley

Muinainen Ruhtinas

Murder Company

Murder in Art

Murderaim

Murdershock

Murdread

Murha (Fin)

Musta Kappeli

Musta Siunaus

Musta Surma

Mustan Kuun Lapset

Mutilation Nation

My Cathedral

My Dawn

My Fate

My Funeral

My Shameful

MyGrain

Myon

Myring

Myrkvidr

Mystic Grave

Mystic Opera

Mystification (Fin)

Mythem

Mythos (Fin)

M鰎gothrium

M鰎ksvamp

M鰎k?/a>

Nadira Strain

Nail Trails

Naildown

Nailed Coil

Nailgunner

Nakhzar

Napoleon Skullfukk

Narghazar

Narmer

National Napalm Syndicate

Nattvind

Nattvindens Gr錿

Naturemorte

Nebelwerfer

Necessary Evil

Necrobiosis (Fin)

Necrobiosis (Fin)

Necrocomium

Necroforge

Necromancer (Fin)

Necromortum

Necronomium

Necropsy (Fin)

Necroslut

Necrovomitor

Neferion

Nekro-Torso

NekroFuk Kvlt

Nekrokrist SS

Nephritis

Nerlich

Nest

Neutron Hammer

Neverend

Neverending Story

New Dawn Foundation

Next in Line

Nhadar

Nicole

Nidhoggr

Night Must Fall

Night on Earth

Nightrealm (Fin)

Nightside (Fin)

Nightwish

Nimet鰊

Njafrar

No Armor

No More

No Sign of Life

Nocturn (Fin)

Nocturnal (Fin)

Nocturnal Arts

Nocturnal Feast

Nocturnal Winds

Noenum

Noitavalkea

Noitawaimo

Nome

Nomicon

Nord Ulv

Nordic Necropolis

Nordishavet

Nornir

Norns

Noroses

Norseman

Northcrown

Norther

Northern Damnation

Northern Discipline

Northern Flame

Northern Invasion

Northern Lights (Fin)

NorthWorld

Nosdrama

Nothing's Grace

Noumena

Nowen

Nuclear Hammer

Nukke

Numinous

Nuxvomica

O

O.S.S.Y.

O.V.D.

Oak (Fin)

Oath (Fin)

Oath of Cirion

Obfuscation

Obruthion

Obscurant

Obsession (Fin)

Obsessive Art

Occult Astral

October Falls

Offering

Old Morgul

Older Hammer

Olhrimnir

Olog-Hai

Olympos Mons

Omnium Gatherum (Fin)

Ondrim

One Orphan More

Oppression (Fin)

Oratorio (Fin)

Ordeal of Soul

Order of the White Hand

Ordog (Fin)

Orenda (Fin)

Originy

Orion Nightfall

Orne

Orpheria

Orthros

Outburst (Fin)

Outrage (Fin)

Overrun

Overt Hostility

Oz

Paganus

Paha Paholainen

Pahuuden Prototyyppi

Pain Confessor

Painflow

Paingrin

Pajavasara

Pakeni

Pangel

Panssarinyrkki

Panzerium

Panzerkvlt

Parade of Souls

Parakletos

Paraxism

Partakrist

Path of Chaos

Pegasos

Pendulum (Fin)

Pentatonik

Perception

Perfect Chaos


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